(State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
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DOI:
10.7502/j.issn.1674-3962.2012.04.04
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Abstract:
In this research, piezoelectric ceramic multilayers based on 090Pb(Zr 0 48Ti052)O3005Pb(Mn 1/3Sb2/3)O3 005Pb(Zn1/3 Nb2/3)O3 quaternary system with silver inner electrodes have been successfully prepared. The process of tape casting, sintering, and poling are intensively investigated. The sintering temperature for the multilayers has been lowered to 850 ℃ by using CuO as the additive. High density is obtained in the multilayer structures even at this low sintering temperature. The piezoelectric measurements display that the ceramic with 3 layers presents piezoelectric coefficient d33 of 873pC/N, which is almost linear with the d 33 value of 306 pC/N of the monolayer ceramic. The fabricated ceramic multilayers can be beneficial to the integration of the piezoelectric devices.