(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Scienceand Technology of China, Chengdu 610054, China)
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DOI:
10.7502/j.issn.1674-3962.2012.07.06
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Abstract:
Soft magnetic thin films have attracted much attention due to their great potentials in high frequency applications. The article summarizes the recent progress of nanocrystalline alloy soft magnetic films, nanogranular soft magnetic films, multilayer films and graphical films, respectively. Special attentions were given to the film preparation techniques, the chemical composition, the microstructure and the high frequency physical properties of the different films, and the main factors affecting the magnetic and high frequency properties were also discussed. Because of the much better properties and performance, nanocrystalline alloy soft magnetic films have replaced the ferrites as the major materials used in high frequency devices. Meanwhile, nanogranular soft magnetic films, multilayer films and emerging graphical films will be the trend in future, thanks to their great freedom in designing microstructure and tailoring materials properties.