(College of Materials Science and Engineering，Chongqing University，Chongqing 400044，China)
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DOI:
10.7502/j.issn.1674-3962.2013.12.04
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Abstract:
Focused ion beam(FIB) technology has become one of indispensable tool in nano technology area with its unique micro-Nano-scale manufacturing capability and advantages. With multi-functionalizing of the new type hardware and improving of the 3D characterization technology, the applications of FIB 3D characterization technology in the field of materials research became more extensive and in-depth. FIB 3D characterization technology has many distinctive features, compared to other 3D characterization technology, such as highly controllable accuracy, largely detectable region, high resolution and so on. FIB technology can analysis the morphology, composition, orientation of different materials in three-dimensional space conditions when it combined with SIMS, SEM, EDX or EBSD systems. This paper briefly summarized four different 3D characterization technologies include 3D-SIMS, 3D-Imaging/EDX and 3D-EBSD, and introduced the details of imaging-cutting principle and process of FIB 3D characterization technology. At the same time, this paper also summarized the applications and the development of several different characterization methods in different materials, and pointed out some deficiencies in application and prospects for the development direction of the FIB 3D characterization technology in the end.