The film of VO2 is a new functional material，and it has a reversible transition between low-temperature semiconductor phase and high-temperature metal phase(S-M) at about 68 ℃. With the transition in crystal structure, the electrical and optical physical properties appear mutation. The properties of VO2 films are widely applied in the thermal, electrical switch and optical storage, more and more scholars at home and abroad are engaged in related research. However, vanadium oxide phase states are quite complex, VO2 stable phase is in a narrow range, so preparation of high purity VO2 films is the researches emphasis and difficulty for all researcher. According to the domestic and international research, this paper briefly reviews the basic properties, and introduces common methods and atomic layer deposition(ALD) technology for preparation of VO2 thin films. Then,it reviews the methods of changing the films preparation and doping process to reduce the phase transition temperature. Application and development trend of VO2 films are discussed.