[1]陳靜,王一平,楊穎,等.一種低溫共燒壓電陶瓷的制備[J].中國材料進(jìn)展,2012,(4):030-33.[doi:10.7502/j.issn.1674-3962.2012.04.04]
CHEN Jing,WANG Yiping,YANG Ying,et al.Piezoelectric Ceramic Multilayers Prepared by a Low Temperature Co Firing Process[J].MATERIALS CHINA,2012,(4):030-33.[doi:10.7502/j.issn.1674-3962.2012.04.04]
點(diǎn)擊復(fù)制
一種低溫共燒壓電陶瓷的制備(
)
中國材料進(jìn)展[ISSN:1674-3962/CN:61-1473/TG]
- 卷:
-
- 期數(shù):
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2012年第4期
- 頁碼:
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030-33
- 欄目:
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特約研究論文
- 出版日期:
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2012-04-25
文章信息/Info
- Title:
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Piezoelectric Ceramic Multilayers Prepared by a Low Temperature Co Firing Process
- 作者:
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陳靜; 王一平; 楊穎; 陳吉; 顧新云
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(南京航空航天大學(xué)航天工程學(xué)院 機(jī)械結(jié)構(gòu)力學(xué)及控制國家重點(diǎn)實(shí)驗(yàn)室，江蘇 南京 210016)
- Author(s):
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CHEN Jing; WANG Yiping; YANG Ying; CHEN Ji; GU Xinyun
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(State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)
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- 關(guān)鍵詞:
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低溫共燒陶瓷（LTCC）; 壓電陶瓷; 多層膜
- DOI:
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10.7502/j.issn.1674-3962.2012.04.04
- 文獻(xiàn)標(biāo)志碼:
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A
- 摘要:
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壓電陶瓷多層膜的低溫共燒特性及壓電性能密切依賴于其成分。采用調(diào)節(jié)壓電材料成分，以0.90Pb(Zr 0 48Ti052)O3 005Pb(Mn 1/3Sb2/3)O3005Pb(Zn1/3Nb2/3)O3四元體系為研究對(duì)象，同時(shí)添加燒結(jié)助劑CuO來實(shí)現(xiàn)多層膜的低溫?zé)Y(jié)。對(duì)多層膜的流延、排膠、燒結(jié)、極化等工藝進(jìn)行探索以優(yōu)化工藝參數(shù),最終獲得850℃燒結(jié)溫度下的高致密度多層壓電陶瓷。壓電性能的測(cè)試表明三層結(jié)構(gòu)的壓電多層膜陶瓷表觀d33達(dá)873pC/N,遠(yuǎn)高于同成分單層陶瓷306 pC/N的d33值。采用多普勒激光測(cè)振儀進(jìn)行掃頻實(shí)驗(yàn)，測(cè)定了多層陶瓷縱向振動(dòng)速度的頻譜，確定了基于該多層膜壓電振子的最優(yōu)諧振頻率。
- Abstract:
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In this research, piezoelectric ceramic multilayers based on 090Pb(Zr 0 48Ti052)O3005Pb(Mn 1/3Sb2/3)O3 005Pb(Zn1/3 Nb2/3)O3 quaternary system with silver inner electrodes have been successfully prepared. The process of tape casting, sintering, and poling are intensively investigated. The sintering temperature for the multilayers has been lowered to 850 ℃ by using CuO as the additive. High density is obtained in the multilayer structures even at this low sintering temperature. The piezoelectric measurements display that the ceramic with 3 layers presents piezoelectric coefficient d33 of 873pC/N, which is almost linear with the d 33 value of 306 pC/N of the monolayer ceramic. The fabricated ceramic multilayers can be beneficial to the integration of the piezoelectric devices.
更新日期/Last Update:
2012-06-13