文章信息/Info

Title:

Research Progress of Additive Elements on the Properties of AZO Thin Films

作者:

李春光; 王飛; 安濤; 王東新

 西安理工大學自動化與信息工程學院

Author(s):

LI Chunguang¹; 3;  WANG Fei¹; 3; *;  AN Tao¹; WANG Dongxin²

關鍵詞:

AZO薄膜; 添加劑元素; 光電性能; 薄膜性能

DOI:

10.7502/j.issn.1674-3962.2013.12.07

文獻標志碼:

A

摘要:

近年來，國內外一些研究者對添加劑元素與鋁元素共摻雜的ZnO薄膜開展了許多研究并發現在AZO薄膜摻入添加劑元素不僅會增強AZO薄膜的光電特性，而且還能優化其晶體結構和表面形貌，某些添加劑元素還可以提高AZO薄膜的多項性能和穩定性，這對研究AZO薄膜性能的提高提供了一個更具潛力的研究方向。文中介紹了AZO薄膜的基本結構、基本特性以及光電性能原理。重點對添加劑元素對AZO薄膜結構的研究和光電性能的研究進行了歸納和總結，并且對這些研究與AZO薄膜進行了對比。綜述了添加劑元素摻入的AZO薄膜目前所報道的磁控濺射法、溶膠-凝膠法和脈沖激光法三種主要制備技術以及各自的優缺點，同時對各方法制備的添加劑元素摻入的AZO薄膜的研究進展進行了闡述。最后介紹了添加劑元素摻入的AZO薄膜在光電領域的應用，展望了其未來發展與研究趨勢。

Abstract:

In recent ye ars , some researchers ha ve carried out many studies on Al doped ZnO thin films with additive elements and found that the properties of AZO thin films with additive element s we re better than th ose of AZO thin films . The research achie v ements mentioned above were summarizedand thebasic structure and optoelectronic propertiesof AZO thin films were introduced in the paper. Thebasic structure and optoelectronic propertiesof AZO thin films with additive elements were described and compared with those of AZO thin films. The main preparation technology and advancement of additive elements doped AZO thin films were reported and the developments and the research trends of additive elements doped AZO thin films wereprospected.