文章信息/Info

Title:

Applications of Focused Ion Beam in the Study on Mechanical Properties of Micro/nanomaterials

作者:

田琳; 付琴琴; 單智偉

(西安交通大學(xué)材料學(xué)院微納尺度材料行為研究中心，陜西西安 710049 ）

Author(s):

TIAN Lin; FU Qin; SHAN Z

(CAMP-Nano, Xi’an Jiaotong University, Xi’an, 710049)

關(guān)鍵詞:

聚焦離子束' target="_blank" rel="external"> FONT-FAMILY: 宋體">聚焦離子束; 納米力學(xué); 微納尺度; 樣品加工

DOI:

10.7502/j.issn.1674-3962.2013.12.01

文獻標(biāo)志碼:

A

摘要:

微納尺度材料是指外觀尺寸或其基本構(gòu)成單元在 10 納米到 10 微米之間（以下簡稱微納尺度）的材料或器件。個案，定性的研究表明微納尺度材料表現(xiàn)出以下特性 : 其性能不能通過外推基于宏觀塊體材料的知識體系來得到；傳統(tǒng)的力學(xué)測試工具和方法無法滿足對微納尺度材料進行測試的要求；微納尺度材料通常在多場耦合條件下服役。這些特性要求研究工作者持續(xù)不斷地尋找和研發(fā)新的工具以期實現(xiàn)對微納尺度材料的可控制備，高通量觀測、操控和定量測量。雙束聚焦離子束技術(shù)不僅具有納米級的空間分辨率從而具備對微納尺度材料的高質(zhì)量成像和動態(tài)監(jiān)測，而且具備納米分辨率的定點刻蝕、誘導(dǎo)沉積等功能。因此，雙束聚焦離子束成為研究微納尺度材料力學(xué)性能的有力工具。本文綜述了近年來聚焦離子束技術(shù)在微納尺度材料類力學(xué)性能研究中的應(yīng)用，并討論了其局限性和發(fā)展趨勢。

Abstract:

Micro/nanomaterials refer to the materials or devices with their physical dimension or basic unit size in the range of 10 nm to 10,000 nm. It has been demonstrated occasionally and qualitatively that the properties of Micro/nanomaterials exhibit the following characteristics: can not be achieved through extrapolate the knowledge system based on their bulk counterpart; the traditional technologies and methods are in sufficient to study them efficiently; multi fields are always involved in the real applications of Micro/nanomaterials. These characteristics require the researchers to find and develop new tools and methods continuously in order to fabricate, monitor, manipulate and test these materials effectively. Dual beam focused ion beam (FIB) can not only be used to image, monitor and manipulate the materials but also has the ability to etch samples to expected geometry and deposit materials for welding et al. at nanometer resolution. Consequently, dual beam FIB has become a powerful tool in the research of nanomechanics. In this paper, the state of the art applications of FIB in nanomechanics research will be reviewed. Its limitation and future development will be also discussed.