文章信息/Info

Title:

 The fabrication and testing of 3D metal passive inductor based on FIB-SID technology

作者:

毛逸飛¹; 王志強¹; 2;  趙路睿¹;  吳文剛¹; 徐軍³

 (¹北京大學微米/納米加工技術國家重點實驗室,北京100871)
( ²北京大學深圳研究院,深圳 )
(³北京大學電子顯微鏡實驗室,北京100871 )

Author(s):

 Y.F.Mao¹;  Z.Q.Wang¹; 2;  L.R.Zhao¹;  W.G.Wu¹;  J.Xu³

 (¹National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics,Peking University, Beijing 100871, P.R. China)
 (²Peking University Shenzhen Graduate School, Shenzhen, China )
(³Electron Microscopy Laboratory, Peking University, Beijing 100871, P.R. China )

關鍵詞:

FIB-SID; 微型金屬無源螺旋電感; 高頻測試

DOI:

10.7502/j.issn.1674-3962.2013.12.05

文獻標志碼:

A

摘要:

 本文重點研究了聚焦離子束的相關原理和應用。主要利用聚焦離子束應力引入致形變（Focused Ion Beam Stress-introduced deformation, FIB-SID）技術與常規(guī)微加工工藝相結合，制備微型金屬無源螺旋電感的設計方法和工藝流程，并對其電學性能進行初步高頻測試。首先在SOI（Silicon-on-insulator）基片上通過光刻，濺射以及各項同性刻蝕等常規(guī)工藝制得懸浮的金屬懸臂梁，再利用FIB刻蝕原理進行應力引入，通過控制注入離子劑量、FIB應力引入的次數(shù)t、FIB掃描的間距l(xiāng)等試驗參數(shù)制得不同尺寸結構的三維螺旋金屬無源電感。最后，采用安捷倫網(wǎng)絡分析儀與微波探針臺，使用GSG結構及相應的去嵌方法，對微型金屬螺線管電感進行了高頻測試。得出了三維螺旋微納電感的電感值、品質因子、電壓駐波比、回波損耗隨頻率變化關系。

Abstract:

This paper focuses on the combination of Focused Ion Beam Stress-introduced Deformation (FIB-SID) and micro-fabrication technology, describing the fabrication process and test methods of metal passive micro-helix inductor. First of all, the suspended metal cantilever is made on SOI(Silicon-on-insulator) by photolithography, sputtering and isotropic etching. Then, the stress is introduced to fabricate 3D metal passive micro-helix inductor with different sizes by controlling ion dose, FIB stress introduced time t, FIB scanning pitch l. Finally, the metal passive micro-helix inductor is test at high frequency with the help of Agilent network analyzers and microwave probe station using GSG test structure and de-embedding process.