文章信息/Info

Title:

Aberration-Corrected High-Resolution Transmission Electron Microscopy and Its Applications in Functional Oxides

作者:

米少波; 賈春林

（1. 西安交通大學材料科學與工程學院 金屬材料強度國家重點實驗，陜西 西安 710049) （2. 西安交通大學微電子學院, 陜西 西安710049） （3. 德國于利希研究中心 ER�睠電鏡中心，德國 于利希 52425）

Author(s):

MI Shaobo;  JIA Chunlin

(1. State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi‘an Jiaotong University, Xi’an 710049, China) (2. School of Microelectronics, Xi�餫n Jiaotong University, Xi‘an 710049, China) (3. Ernst Ruska Center for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany)

關鍵詞:

界面; 顯微結構; 氧化物; 像差校正高分辨透射電子顯微術; 負球差成像術

Keywords:

interface;  microstructure;  oxides;  aberration�瞔orrected high�瞨esolution transmission electron microscopy;  negative CS imaging technique

DOI:

10.7502/j.issn.1674-3962.2017.07.10

文獻標志碼:

A

摘要:

簡要介紹基于像差校正高分辨透射電子顯微鏡的負球差成像技術及其在研究功能氧化物材料原子構型中的應用。在亞埃尺度的空間分辨率下，負球差成像技術不但可以獲得高襯度的原子尺度結構像，而且可以在皮米精度測量材料中的原子的相對位移，從而精確表征材料結構、晶格缺陷的細微變化及其對材料性能的影響。負球差成像技術為定量解析材料中包含輕原子（例如，氧）在內的精細結構問題提供了有力的手段。重點介紹了負球差成像技術在表征鐵電材料電偶極矩、疇結構及疇壁，氧化物異質界面和三維MgO晶體表面精細結構中的應用。

Abstract:

In the present review paper we introduce an imaging technique based on aberration�瞔orrected TEM, the negative CS imaging (NCSI) technique, which results in a high�瞔ontrast of image in comparison with conventional positive CS imaging (PCSI) technique. The novel NSCI technique has been applied for not only acquiring high�瞔ontrast atomic�瞨esolution structure images of materials, but also determining the relative shifts of atomic columns with a precision of a few picometres. In addition, the NCSI technique provides experimental basis for quantitative analysis of the fine changes of atoms including light elements (e�眊�� oxygen) in oxide materials, e�眊�� the electric dipoles, domains and domain walls in oxide ferroelectrics, interfaces in heterostructural multilayer films as well as the 3D shape of a nanoscale MgO crystal.