文章信息/Info

Title:

Effect of Nitrogen Flow on Corrosion Resistance of High Power Impulse Magnetron Sputtering CrNx/CrC Composite Coating

文章編號:

1674-3962(2022)07-0573-05

作者:

向君1; 曹悅悅2; 梅屹峰1 ; 王卓然1

（1. 西安理工大學，陜西 西安 710054）（2. 西安理工大學材料學院，陜西 西安 710054）

Author(s):

XIANG Jun1;  CAO Yueyue2;  MEI Yifeng1;  WANG Zhuoran1

(1. Xi’an University of Technology, Xi’an 710054, China) （2. School of Materials, Xi’an University of Technology, Xi’an 710054, China)

關鍵詞:

高功率脈沖磁控濺射; CrNx/CrC復合鍍層; 氮氣流量; 微觀結構; 耐蝕性能

Keywords:

high power impulse magnetron sputtering;  CrNx/CrC composite coating;  nitrogen flow;  microstructure;  corrosion resistance

分類號:

TB43

DOI:

10.7502/j.issn.1674-.202107034

文獻標志碼:

A

摘要:

利用高功率脈沖磁控濺射（high power impulse magnetron sputtering, HiPIMS）在單晶硅和304不銹鋼基底上制備了CrNx/CrC復合鍍層，并通過掃描電子顯微鏡(SEM)、X射線衍射 (XRD)以及浸泡法對其形貌結構、物相及耐蝕性能進行了分析，研究了氮氣流量對CrNx/CrC復合鍍層微觀組織形貌和耐蝕性能的影響。結果表明：Cr靶在200 Hz、占空比為6%的電場條件下可以形成穩(wěn)態(tài)的高功率脈沖放電；CrNx/CrC復合鍍層表面由不規(guī)則的球形顆粒堆積組成，均勻緊密；CrNx/CrC復合鍍層呈柱狀生長，且截面可明顯觀察到較明顯的分層界面，分別是CrC層和CrNx層；受Ar+刻蝕作用減弱的影響，隨著氮氣流量的增加，CrNx/CrC復合鍍層的厚度和平均沉積速率先略微增加，之后再明顯減小；隨著氮氣流量的增加，CrNx/CrC復合鍍層的致密度有所增加；當?shù)獨饬髁繛?0 mL·min-1時，鍍層晶柱的間距最小，且上下層結合最緊密，耐蝕性能最好。

Abstract:

CrNx/CrC composite coatings were deposited on the substrate of single crystal silicon and 304 stainless steel by the high power impulse magnetron sputtering (HiPIMS), and the morphology structure, phase and corrosion resistance were analyzed by scanning electron microscope (SEM), X-ray diffraction technology (XRD) and immersion method. The effects of nitrogen flow on the microstructure and corrosion resistance of CrNx/CrC composite coating were studied. The results show that Cr target can form a steady pulse discharge with high power under an electric field of 200 Hz and a duty cycle of 6%. The surface of CrNx/CrC composite coating is composed of irregular spherical particles, which are uniform and compact. The CrNx/CrC composite coating grows in columnar form, and obvious stratification interfaces are observed in the cross section, which are CrNx layer and CrC layer respectively. With the increase of nitrogen flow, the thickness and average deposition rate of CrNx/CrC composite coating increase slightly and then decrease obviously due to the decrease of Ar+ etching effect. With the increase of nitrogen flow, the density of the coating increases slightly. When the nitrogen flow is 60 mL·min-1, the distance between the crystal columns of the coating is the smallest, and the upper and lower layers are most closely combined, and the corrosion resistance is the best.