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[1]藺浩博,劉寧濤,吳思淼,等.氧化鎵的n型摻雜研究進展[J].中國材料進展,2023,42(04):277-288.[doi:10.7502/j.issn.1674-3962.202207018]
 LIN Haobo,LIU Ningtao,WU Simiao,et al.Research Progress of n-Type Doping of Gallium Oxide[J].MATERIALS CHINA,2023,42(04):277-288.[doi:10.7502/j.issn.1674-3962.202207018]
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氧化鎵的n型摻雜研究進展()
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中國材料進展[ISSN:1674-3962/CN:61-1473/TG]

卷:
42
期數:
2023年第04期
頁碼:
277-288
欄目:
出版日期:
2023-04-30

文章信息/Info

Title:
Research Progress of n-Type Doping of Gallium Oxide
文章編號:
1674-3962(2023)04-0277-12
作者:
藺浩博12劉寧濤1吳思淼12張文瑞1葉繼春1
1. 中國科學院寧波材料技術與工程研究所,浙江 寧波 315201 2. 寧波大學材料科學與化學工程學院,浙江 寧波 315211
Author(s):
LIN Haobo12 LIU Ningtao1 WU Simiao12ZHANG Wenrui1YE Jichun1
1. Ningbo Institute of Materials Technology and Engineering of the Chinese Academy of Sciences, Ningbo 315201, China 2. School of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315211, China
關鍵詞:
氧化鎵n型摻雜本征缺陷寬禁帶氧化物半導體
Keywords:
gallium oxide n-type doping intrinsic defects wide-bandgap oxides semiconductors
分類號:
O471
DOI:
10.7502/j.issn.1674-3962.202207018
文獻標志碼:
A
摘要:
作為一種新興寬禁帶半導體,氧化鎵具有寬帶隙、高擊穿電壓、高巴利加優值及良好的熱穩定性的優點,在功率電子器件、日盲紫外探測器以及氣體探測器等領域有著極大的應用潛力。首先概述了氧化鎵相比于其他半導體材料存在的優勢,介紹了氧化鎵的不同晶相(α、β、γ、δ、ε、κ)的物理性質及相應的潛在應用方向。其次,詳細討論了氧化鎵的n型摻雜的研究現狀,包括本征缺陷,Si,Ge,Sn以及其他高價元素摻雜的機理和輸運調控規律。最后,探討了氧化鎵目前存在的主要問題,包括由于難以形成自由空穴而導致的p型摻雜困難以及本征熱導率過低導致的器件難以散熱的問題,并對氧化鎵未來的發展進行了展望。
Abstract:
As an emerging ultrawide bandgap semiconductor, gallium oxide has great application potential in power electronic devices, solar-blind ultraviolet detectors and gas detectors, which has the advantages of wide bandgap, high breakdown voltage, high Baliga‘s figure of merit and good thermal stability. Firstly, the advantages of gallium oxide over other semiconductor materials are summarized, and the physical properties of different crystalline phases (α, β, γ, δ, ε, κ) of gallium oxide and their corresponding potential application directions are introduced. Secondly, the research status of n-type doping of gallium oxide is discussed in detail, including intrinsic defects, doping mechanism and transport modulation of Si, Ge, Sn and other high-valence dopants. Finally, current main problems of gallium oxide are discussed, including the difficulty of p-type doping and low intrinsic thermal conductivity, and the development forground of gallium oxide in the future is prospected.

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備注/Memo

備注/Memo:
收稿日期:2022-07-15修回日期:2022-08-18 基金項目:浙江省自然科學基金重點項目(LZ21F040001);寧波市 重大科技攻關項目(2022Z016) 第一作者:藺浩博,男,1999年生,碩士研究生 通訊作者:張文瑞,男,1990年生,研究員,博士生導師, Email: zhangwenrui@nimte.ac.cn 葉繼春,男,1977年生,研究員,博士生導師, Email: jichun.ye@nimte.ac.cn
更新日期/Last Update: 2023-03-22
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