[1]涂建新,郝魁,霍彩霞,等.半導體領域用碳材料表面抗腐蝕涂層的研究進展[J].中國材料進展,2025,44(07):636-647.[doi:10.7502/j.issn.1674-3962.202405010]
Jianxin TU,Kui HAO,Caixia HUO,et al.Research Progress on Corrosion-Resistant Coatings of Carbon-Based Materials for the Semiconductor Field[J].MATERIALS CHINA,2025,44(07):636-647.[doi:10.7502/j.issn.1674-3962.202405010]
點擊復制
半導體領域用碳材料表面抗腐蝕涂層的研究進展(
)
中國材料進展[ISSN:1674-3962/CN:61-1473/TG]
- 卷:
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44
- 期數:
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2025年07
- 頁碼:
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636-647
- 欄目:
-
- 出版日期:
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2025-07-30
文章信息/Info
- Title:
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Research Progress on Corrosion-Resistant Coatings of Carbon-Based Materials for the Semiconductor Field
- 文章編號:
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1674-3962(2025)07-0636-12
- 作者:
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涂建新; 郝魁; 霍彩霞; 郭子源; 王劍浩; 李愛軍; 白瑞成; 季志豪
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1. 上海大學材料科學與工程學院，上海 200444
2. 上海大學 紹興研究院，浙江 紹興 312000
- Author(s):
-
Jianxin TU; Kui HAO; Caixia HUO; Ziyuan GUO; Jianhao WANG; Aijun LI; Ruicheng BAI; Zhihao JI
-
1.School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
2.Shaoxing Institute of Technology, Shanghai University, Shaoxing 312000, China
-
- 關鍵詞:
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半導體; 高溫腐蝕; 腐蝕氣氛; 碳素材料; 耐腐蝕涂層; 碳化硅; 碳化鉭
- Keywords:
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semiconductor; high-temperature corrosion; corrosive atmosphere; carbon materials; corrosion-resistant coatings; silicon carbide; tantalum carbide
- 分類號:
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TB34;TB304
- DOI:
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10.7502/j.issn.1674-3962.202405010
- 文獻標志碼:
-
A
備注/Memo
- 備注/Memo:
-
Received date：2024-05-10Revised date：2024-05-26
Foundation item：National Natural Science Foundation of China(12002196，12102140)
First author：Jianxin TU, Male, Born in 1992, Doctor,
Email:tujianxin@shu.edu.cn
Corresponding author：Ruicheng BAI, Male, Born in 1968, Professor,
Email:rcbai@shu.edu.cn
更新日期/Last Update:
2025-07-29